A NUMERICAL-SIMULATION OF RF GLOW-DISCHARGE CONTAINING AN ELECTRONEGATIVE GAS-COMPOSITION
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | OH, YH | ko |
| dc.contributor.author | CHOI, NH | ko |
| dc.contributor.author | Choi, Duk In | ko |
| dc.date.accessioned | 2013-02-24T10:59:34Z | - |
| dc.date.available | 2013-02-24T10:59:34Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1990-04 | - |
| dc.identifier.citation | JOURNAL OF APPLIED PHYSICS, v.67, no.7, pp.3264 - 3268 | - |
| dc.identifier.issn | 0021-8979 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/56659 | - |
| dc.language | English | - |
| dc.publisher | AMER INST PHYSICS | - |
| dc.title | A NUMERICAL-SIMULATION OF RF GLOW-DISCHARGE CONTAINING AN ELECTRONEGATIVE GAS-COMPOSITION | - |
| dc.type | Article | - |
| dc.identifier.wosid | A1990CV63900007 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 67 | - |
| dc.citation.issue | 7 | - |
| dc.citation.beginningpage | 3264 | - |
| dc.citation.endingpage | 3268 | - |
| dc.citation.publicationname | JOURNAL OF APPLIED PHYSICS | - |
| dc.identifier.doi | 10.1063/1.345360 | - |
| dc.contributor.nonIdAuthor | OH, YH | - |
| dc.contributor.nonIdAuthor | CHOI, NH | - |
| dc.type.journalArticle | Article | - |
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