The Dielectric Discontinuity Microscope - A New Characterization Tool
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | R. W. Allison Jr. | ko |
| dc.contributor.author | E. Yoon | ko |
| dc.contributor.author | R. Kovacs | ko |
| dc.contributor.author | C. Skinner | ko |
| dc.date.accessioned | 2013-02-24T10:56:07Z | - |
| dc.date.available | 2013-02-24T10:56:07Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1992 | - |
| dc.identifier.citation | MICROLITHOGRAPHY WORLD, v.1, no.4, pp.15 - 20 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/56636 | - |
| dc.language | English | - |
| dc.publisher | Penn Well Publication | - |
| dc.title | The Dielectric Discontinuity Microscope - A New Characterization Tool | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 1 | - |
| dc.citation.issue | 4 | - |
| dc.citation.beginningpage | 15 | - |
| dc.citation.endingpage | 20 | - |
| dc.citation.publicationname | MICROLITHOGRAPHY WORLD | - |
| dc.contributor.localauthor | E. Yoon | - |
| dc.contributor.nonIdAuthor | R. W. Allison Jr. | - |
| dc.contributor.nonIdAuthor | R. Kovacs | - |
| dc.contributor.nonIdAuthor | C. Skinner | - |
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