The Bond Structures and Properties of Chemically Vapor Deposited Amorphous SiC

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Publisher
Elsevier Science Sa
Issue Date
1988-02
Language
English
Article Type
Article
Citation

THIN SOLID FILMS, v.166, no.1, pp.367 - 374

ISSN
0040-6090
URI
http://hdl.handle.net/10203/55924
Appears in Collection
RIMS Journal Papers
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