학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.8, [ ii, 58 p. ]
타겟수명 액상량; 타겟효율; 타겟식각; 마그네트론 스퍼터링; MAGNETRON SPUTTERING; AND LIQUID VOLUME FRACTION; TEMPERATURE; PIC-MCC; TARGET LIFE-TIME; TARGET UTILIZATION; EROSION
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