RF magnetron sputtering 법으로 제조한 MgO 완충층과 Pt 박막의 (100) 배향성에 관한 연구A study on the (100) preferred orientation of the Pt thin films and MgO buffer layer prepared by RF magnetron sputtering

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Advisors
위당문researcherWee, Dang-Moonresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1995
Identifier
99497/325007 / 000933404
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ [iv], 65 p. ]

Keywords

Buffer layer

URI
http://hdl.handle.net/10203/51273
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99497&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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