RF magnetron sputtering 법으로 제조한 MgO 완충층과 Pt 박막의 (100) 배향성에 관한 연구A study on the (100) preferred orientation of the Pt thin films and MgO buffer layer prepared by RF magnetron sputtering
- Advisors
- 위당문researcher; Wee, Dang-Moonresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 99497/325007 / 000933404
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ [iv], 65 p. ]
- Keywords
Buffer layer
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.