RF magnetron sputtering 법으로 제조한 MgO 완충층과 Pt 박막의 (100) 배향성에 관한 연구A study on the (100) preferred orientation of the Pt thin films and MgO buffer layer prepared by RF magnetron sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 위당문 | - |
| dc.contributor.advisor | Wee, Dang-Moon | - |
| dc.contributor.author | 이창승 | - |
| dc.contributor.author | Lee, Chang-Seung | - |
| dc.date.accessioned | 2011-12-15T01:40:58Z | - |
| dc.date.available | 2011-12-15T01:40:58Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99497&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51273 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ [iv], 65 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Buffer layer | - |
| dc.title | RF magnetron sputtering 법으로 제조한 MgO 완충층과 Pt 박막의 (100) 배향성에 관한 연구 | - |
| dc.title.alternative | A study on the (100) preferred orientation of the Pt thin films and MgO buffer layer prepared by RF magnetron sputtering | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99497/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000933404 | - |
| dc.contributor.localauthor | 이창승 | - |
| dc.contributor.localauthor | Lee, Chang-Seung | - |
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- MS-Theses_Master(석사논문)
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