ECR-플라즈마 화학 증착법에 의해 탄탈륨 산화 박막 제조시 증착 변수 및 열처리 조건이 증착층의 전기적 성질에 미치는 영향 = The effects of the deposition variable and annealing condition on the electrical properties of the Ta2O5 thin films deposited by ECR-PECVD

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Advisors
천성순researcherChun, Soung-Soonresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1994
Identifier
69525/325007 / 000923483
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1994.2, [ iv, 114 p. ]

URI
http://hdl.handle.net/10203/51255
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69525&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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