DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 천성순 | - |
dc.contributor.advisor | Chun, Soung-Soon | - |
dc.contributor.author | 조복원 | - |
dc.contributor.author | Cho, Bok-Won | - |
dc.date.accessioned | 2011-12-15T01:40:41Z | - |
dc.date.available | 2011-12-15T01:40:41Z | - |
dc.date.issued | 1994 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69525&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/51255 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1994.2, [ iv, 114 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | ECR-플라즈마 화학 증착법에 의해 탄탈륨 산화 박막 제조시 증착 변수 및 열처리 조건이 증착층의 전기적 성질에 미치는 영향 | - |
dc.title.alternative | The effects of the deposition variable and annealing condition on the electrical properties of the Ta2O5 thin films deposited by ECR-PECVD | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 69525/325007 | - |
dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
dc.identifier.uid | 000923483 | - |
dc.contributor.localauthor | 조복원 | - |
dc.contributor.localauthor | Cho, Bok-Won | - |
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