플라즈마 화학증착법에 의하여 증착된 aluminum oxide 박막의 C-V 특성에 증착 변수가 미치는 영향The effect of deposition parameters on C-V characteristics of aluminum oxide thin films deposited by PECVD
- Advisors
- 천성순researcher; Chun, Soung-Soonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1990
- Identifier
- 67533/325007 / 000881080
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1990.2, [ [iv], 90 p. ]
- Keywords
Electrical properties
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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