플라즈마 화학증착법에 의하여 증착된 aluminum oxide 박막의 C-V 특성에 증착 변수가 미치는 영향The effect of deposition parameters on C-V characteristics of aluminum oxide thin films deposited by PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 김용천 | - |
| dc.contributor.author | Kim, Yong-Chun | - |
| dc.date.accessioned | 2011-12-15T01:39:30Z | - |
| dc.date.available | 2011-12-15T01:39:30Z | - |
| dc.date.issued | 1990 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67533&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51182 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1990.2, [ [iv], 90 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Electrical properties | - |
| dc.title | 플라즈마 화학증착법에 의하여 증착된 aluminum oxide 박막의 C-V 특성에 증착 변수가 미치는 영향 | - |
| dc.title.alternative | The effect of deposition parameters on C-V characteristics of aluminum oxide thin films deposited by PECVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 67533/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000881080 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Soung-Soon | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.