화학증착법으로 제조한 다이아몬드막과 Si 기지에서의 응력해석에 관한 연구 = A study on the stress analysis of CVD diamond films on Si substrate

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Advisors
유진researcherYu, Jinresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
2000
Identifier
158608/325007 / 000983285
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ vii, 52 p. ]

Keywords

고유응력; 실리콘 크리프; 화학증착법; 다이아몬드막; 영계수; Young``s modulus; Intrinsic stress; Si creep; HFCVD; Diamond film

URI
http://hdl.handle.net/10203/50781
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158608&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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