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학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ vii, 52 p. ]
고유응력; 실리콘 크리프; 화학증착법; 다이아몬드막; 영계수; Young``s modulus; Intrinsic stress; Si creep; HFCVD; Diamond film
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