DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 유진 | - |
dc.contributor.advisor | Yu, Jin | - |
dc.contributor.author | 손윤철 | - |
dc.contributor.author | Sohn, Yoon-Chul | - |
dc.date.accessioned | 2011-12-15T01:32:59Z | - |
dc.date.available | 2011-12-15T01:32:59Z | - |
dc.date.issued | 2000 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158608&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50781 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ vii, 52 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 고유응력 | - |
dc.subject | 실리콘 크리프 | - |
dc.subject | 화학증착법 | - |
dc.subject | 다이아몬드막 | - |
dc.subject | 영계수 | - |
dc.subject | Young``s modulus | - |
dc.subject | Intrinsic stress | - |
dc.subject | Si creep | - |
dc.subject | HFCVD | - |
dc.subject | Diamond film | - |
dc.title | 화학증착법으로 제조한 다이아몬드막과 Si 기지에서의 응력해석에 관한 연구 | - |
dc.title.alternative | A study on the stress analysis of CVD diamond films on Si substrate | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 158608/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000983285 | - |
dc.contributor.localauthor | 유진 | - |
dc.contributor.localauthor | Yu, Jin | - |
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