원자층 단위 증착법으로 증착된 TiN 증착기구에 대한 모델 연구A study of the deposition model about ALD (atomic layer deposition) TiN method
- Advisors
- 강상원researcher; Kang, Sang-Wonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1999
- Identifier
- 150068/325007 / 000973287
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ iv , 85 p. ]
- Keywords
증착기구; 흡착; 원자층증착; 성장모델; TDMAT; Adsorption; Deposition model; ALD; TiN
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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