원자층 단위 증착법으로 증착된 TiN 증착기구에 대한 모델 연구A study of the deposition model about ALD (atomic layer deposition) TiN method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 강상원 | - |
| dc.contributor.advisor | Kang, Sang-Won | - |
| dc.contributor.author | 박진성 | - |
| dc.contributor.author | Park, Jin-Seong | - |
| dc.date.accessioned | 2011-12-15T01:32:01Z | - |
| dc.date.available | 2011-12-15T01:32:01Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150068&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50722 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ iv , 85 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 증착기구 | - |
| dc.subject | 흡착 | - |
| dc.subject | 원자층증착 | - |
| dc.subject | 성장모델 | - |
| dc.subject | TDMAT | - |
| dc.subject | Adsorption | - |
| dc.subject | Deposition model | - |
| dc.subject | ALD | - |
| dc.subject | TiN | - |
| dc.title | 원자층 단위 증착법으로 증착된 TiN 증착기구에 대한 모델 연구 | - |
| dc.title.alternative | A study of the deposition model about ALD (atomic layer deposition) TiN method | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 150068/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000973287 | - |
| dc.contributor.localauthor | 강상원 | - |
| dc.contributor.localauthor | Kang, Sang-Won | - |
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