Cu 확산 방지용 TiN의 stuffing 효과에 관한 연구A study on the effect of TiN stuffing for Cu diffusion barrier
- Advisors
- 박종욱researcher; Park, Chong-Ookresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 133570/325007 / 000963671
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ 67 p. ]
- Keywords
확산 방지막; 충진 효과; TiN; Diffusion barrier; Stuffing
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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