Cu 확산 방지용 TiN의 stuffing 효과에 관한 연구A study on the effect of TiN stuffing for Cu diffusion barrier
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박종욱 | - |
| dc.contributor.advisor | Park, Chong-Ook | - |
| dc.contributor.author | 황용섭 | - |
| dc.contributor.author | Hwang, Yong-Sup | - |
| dc.date.accessioned | 2011-12-15T01:31:33Z | - |
| dc.date.available | 2011-12-15T01:31:33Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133570&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50694 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ 67 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 확산 방지막 | - |
| dc.subject | 충진 효과 | - |
| dc.subject | TiN | - |
| dc.subject | Diffusion barrier | - |
| dc.subject | Stuffing | - |
| dc.title | Cu 확산 방지용 TiN의 stuffing 효과에 관한 연구 | - |
| dc.title.alternative | A study on the effect of TiN stuffing for Cu diffusion barrier | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 133570/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000963671 | - |
| dc.contributor.localauthor | 박종욱 | - |
| dc.contributor.localauthor | Park, Chong-Ook | - |
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