Attenuated phase shifting mask용 $CrF_x$ Film의 특성 분석 및 모사 연구Characterization and simulation study of $CrF_x$ films for attenuated phase shifting mask
- Advisors
- 노광수researcher; No, Kwang-Sooresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 113131/325007 / 000953100
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 80 p. ]
- Keywords
크롬플루오라이드; 박막; Att-PSM(Attenuated phase shifting mask); CrFx; 위상변위마스크; Film
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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