Attenuated phase shifting mask용 $CrF_x$ Film의 특성 분석 및 모사 연구Characterization and simulation study of $CrF_x$ films for attenuated phase shifting mask
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 노광수 | - |
| dc.contributor.advisor | No, Kwang-Soo | - |
| dc.contributor.author | 김은아 | - |
| dc.contributor.author | Kim, Eun-Ah | - |
| dc.date.accessioned | 2011-12-15T01:30:16Z | - |
| dc.date.available | 2011-12-15T01:30:16Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113131&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50617 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 80 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 크롬플루오라이드 | - |
| dc.subject | 박막 | - |
| dc.subject | Att-PSM(Attenuated phase shifting mask) | - |
| dc.subject | CrFx | - |
| dc.subject | 위상변위마스크 | - |
| dc.subject | Film | - |
| dc.title | Attenuated phase shifting mask용 $CrF_x$ Film의 특성 분석 및 모사 연구 | - |
| dc.title.alternative | Characterization and simulation study of $CrF_x$ films for attenuated phase shifting mask | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 113131/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000953100 | - |
| dc.contributor.localauthor | 노광수 | - |
| dc.contributor.localauthor | No, Kwang-Soo | - |
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