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학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 62 p. ]
비저항; 잔류응력; 배향도; 알루미늄 박막; 스퍼터링; Sputtering; Resistivity; Residual stress; Orientation; Al thin film
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