스퍼터링법으로 증착한 알루미늄 박막의 잔류응력에 따른 결정 배향성이 전기적성질에 미치는 영향Effect of crystallographic orientation affected by residual stress on electrical property of Al thin films deposited by sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 강석중 | - |
| dc.contributor.advisor | Kang, Suk-Joong L. | - |
| dc.contributor.author | 김석필 | - |
| dc.contributor.author | Kim, Suk-Pil | - |
| dc.date.accessioned | 2011-12-15T01:30:14Z | - |
| dc.date.available | 2011-12-15T01:30:14Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113129&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50615 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 62 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 비저항 | - |
| dc.subject | 잔류응력 | - |
| dc.subject | 배향도 | - |
| dc.subject | 알루미늄 박막 | - |
| dc.subject | 스퍼터링 | - |
| dc.subject | Sputtering | - |
| dc.subject | Resistivity | - |
| dc.subject | Residual stress | - |
| dc.subject | Orientation | - |
| dc.subject | Al thin film | - |
| dc.title | 스퍼터링법으로 증착한 알루미늄 박막의 잔류응력에 따른 결정 배향성이 전기적성질에 미치는 영향 | - |
| dc.title.alternative | Effect of crystallographic orientation affected by residual stress on electrical property of Al thin films deposited by sputtering | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 113129/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000953067 | - |
| dc.contributor.localauthor | 강석중 | - |
| dc.contributor.localauthor | Kang, Suk-Joong L. | - |
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