반응성 스퍼터링법에 의해 제조된 PZT박막에 Ta첨가의 영향에 관한 연구A study on effects of Ta addition in PZT thin films by reactive sputtering
- Advisors
- 김호기researcher; Kim, Ho-Giresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106178/325007 / 000943546
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ vi, 76 p. ]
- Keywords
Ta; 반응성 스퍼터링; PZT; 첨가물; Dopant; Ta; Reactive Sputtering; PZT
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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