반응성 스퍼터링법에 의해 제조된 PZT박막에 Ta첨가의 영향에 관한 연구A study on effects of Ta addition in PZT thin films by reactive sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김호기 | - |
| dc.contributor.advisor | Kim, Ho-Gi | - |
| dc.contributor.author | 최광표 | - |
| dc.contributor.author | Choi, Gwang-Pyo | - |
| dc.date.accessioned | 2011-12-15T01:29:45Z | - |
| dc.date.available | 2011-12-15T01:29:45Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106178&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50585 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ vi, 76 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Ta | - |
| dc.subject | 반응성 스퍼터링 | - |
| dc.subject | PZT | - |
| dc.subject | 첨가물 | - |
| dc.subject | Dopant | - |
| dc.subject | Ta | - |
| dc.subject | Reactive Sputtering | - |
| dc.subject | PZT | - |
| dc.title | 반응성 스퍼터링법에 의해 제조된 PZT박막에 Ta첨가의 영향에 관한 연구 | - |
| dc.title.alternative | A study on effects of Ta addition in PZT thin films by reactive sputtering | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 106178/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000943546 | - |
| dc.contributor.localauthor | 김호기 | - |
| dc.contributor.localauthor | Kim, Ho-Gi | - |
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