학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ iv, 150 p. ]
에피 성장; 금속유기화학기상증착법; heavily doped Si; 코발트 실리사이드; 누설 전류; leakage current; epitaxial growth; MOCVD; heavily doped Si; cobalt silicide
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.