산화-환원 ALD 증착법에 의해 형성된 Nickel 박막의 특성에 관한 연구 = A study on the nickel thin films formed by oxidation-reduction ALD

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Advisors
강상원researcherKang, Sang-Wonresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
2002
Identifier
177275/325007 / 000975385
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ xi, 95 p. ]

Keywords

니켈; 원자층 단위 증착법; Atomic Layer Deposition; glue layer; Nickel

URI
http://hdl.handle.net/10203/50261
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=177275&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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