산화-환원 ALD 증착법에 의해 형성된 Nickel 박막의 특성에 관한 연구A study on the nickel thin films formed by oxidation-reduction ALD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 강상원 | - |
| dc.contributor.advisor | Kang, Sang-Won | - |
| dc.contributor.author | 채정헌 | - |
| dc.contributor.author | Chae, Jung-Hun | - |
| dc.date.accessioned | 2011-12-15T01:04:21Z | - |
| dc.date.available | 2011-12-15T01:04:21Z | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=177275&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50261 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ xi, 95 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 니켈 | - |
| dc.subject | 원자층 단위 증착법 | - |
| dc.subject | Atomic Layer Deposition | - |
| dc.subject | glue layer | - |
| dc.subject | Nickel | - |
| dc.title | 산화-환원 ALD 증착법에 의해 형성된 Nickel 박막의 특성에 관한 연구 | - |
| dc.title.alternative | A study on the nickel thin films formed by oxidation-reduction ALD | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 177275/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000975385 | - |
| dc.contributor.localauthor | 채정헌 | - |
| dc.contributor.localauthor | Chae, Jung-Hun | - |
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.