$SrBi_2Ta_2O_9$ 강유전체 비 휘발 기억소자에서 Pt/Ti 전극의 hillock 생성 = Hillock formation in Pt/Ti electrode for $SrBi_2Ta_2O_9$ ferroelectric random access memory

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Advisors
최시경researcherChoi, Si-Kyungresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
2002
Identifier
174586/325007 / 000935021
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ xiii, 133 p. ]

Keywords

압축 응력; Ti 산화; Pt/Ti 전극 적층; 힐락; SBT 커페시터; SBT capacitor; compressive stress; titanium oxidation; Pt/Ti electrode stack; platinum hillock

URI
http://hdl.handle.net/10203/50246
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=174586&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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