$SrBi_2Ta_2O_9$ 강유전체 비 휘발 기억소자에서 Pt/Ti 전극의 hillock 생성Hillock formation in Pt/Ti electrode for $SrBi_2Ta_2O_9$ ferroelectric random access memory
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 최시경 | - |
| dc.contributor.advisor | Choi, Si-Kyung | - |
| dc.contributor.author | 권순용 | - |
| dc.contributor.author | Kweon, Soon-Yong | - |
| dc.date.accessioned | 2011-12-15T01:04:06Z | - |
| dc.date.available | 2011-12-15T01:04:06Z | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=174586&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50246 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 2002.2, [ xiii, 133 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 압축 응력 | - |
| dc.subject | Ti 산화 | - |
| dc.subject | Pt/Ti 전극 적층 | - |
| dc.subject | 힐락 | - |
| dc.subject | SBT 커페시터 | - |
| dc.subject | SBT capacitor | - |
| dc.subject | compressive stress | - |
| dc.subject | titanium oxidation | - |
| dc.subject | Pt/Ti electrode stack | - |
| dc.subject | platinum hillock | - |
| dc.title | $SrBi_2Ta_2O_9$ 강유전체 비 휘발 기억소자에서 Pt/Ti 전극의 hillock 생성 | - |
| dc.title.alternative | Hillock formation in Pt/Ti electrode for $SrBi_2Ta_2O_9$ ferroelectric random access memory | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 174586/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000935021 | - |
| dc.contributor.localauthor | 권순용 | - |
| dc.contributor.localauthor | Kweon, Soon-Yong | - |
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