스위치 소자용 열구동형 다결정 실리콘 마이크로브릿지의 열적 구동특성 연구A study on the actuations characteristics of thermally-driven polycrystalline silicon microbridge for switching device applications
- Advisors
- 강상원researcher; Kang, Sang-Wonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1999
- Identifier
- 150161/325007 / 000945317
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1999.2, [ x, 116 p. ]
- Keywords
열용량; 열전도도; 열구동체; 미소전자기계시스템; 비저항온도비례상수; Temperature coefficient of resistivity; Thermal capacitance; Thermal conductance; Thermal actuator; MEMS
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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