스위치 소자용 열구동형 다결정 실리콘 마이크로브릿지의 열적 구동특성 연구A study on the actuations characteristics of thermally-driven polycrystalline silicon microbridge for switching device applications
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 강상원 | - |
| dc.contributor.advisor | Kang, Sang-Won | - |
| dc.contributor.author | 이재열 | - |
| dc.contributor.author | Lee, Jae-Youl | - |
| dc.date.accessioned | 2011-12-15T01:03:50Z | - |
| dc.date.available | 2011-12-15T01:03:50Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150161&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50232 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1999.2, [ x, 116 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 열용량 | - |
| dc.subject | 열전도도 | - |
| dc.subject | 열구동체 | - |
| dc.subject | 미소전자기계시스템 | - |
| dc.subject | 비저항온도비례상수 | - |
| dc.subject | Temperature coefficient of resistivity | - |
| dc.subject | Thermal capacitance | - |
| dc.subject | Thermal conductance | - |
| dc.subject | Thermal actuator | - |
| dc.subject | MEMS | - |
| dc.title | 스위치 소자용 열구동형 다결정 실리콘 마이크로브릿지의 열적 구동특성 연구 | - |
| dc.title.alternative | A study on the actuations characteristics of thermally-driven polycrystalline silicon microbridge for switching device applications | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 150161/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000945317 | - |
| dc.contributor.localauthor | 이재열 | - |
| dc.contributor.localauthor | Lee, Jae-Youl | - |
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- MS-Theses_Ph.D.(박사논문)
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