마이크로웨이브에 의한 비정질 실리콘의 저온 고상결정화 거동에 관한 연구A study on the low-temperature solid phase crystallization behavior of amorphous silicon thin films by microwave heating
- Advisors
- 안병태researcher; Ahn, Byung-Taeresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 128167/325007 / 000935280
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.8, [ x, 138 p. ]
- Keywords
고상결정화; 마이크로웨이브 가열; 저온 결정화; Low temperature crystallizaiton; Solid phase crystallization; Microwave heating
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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