마이크로웨이브에 의한 비정질 실리콘의 저온 고상결정화 거동에 관한 연구A study on the low-temperature solid phase crystallization behavior of amorphous silicon thin films by microwave heating

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dc.contributor.advisor안병태-
dc.contributor.advisorAhn, Byung-Tae-
dc.contributor.author이정노-
dc.contributor.authorLee, Jeong-No-
dc.date.accessioned2011-12-15T01:03:05Z-
dc.date.available2011-12-15T01:03:05Z-
dc.date.issued1997-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128167&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50187-
dc.description학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.8, [ x, 138 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject고상결정화-
dc.subject마이크로웨이브 가열-
dc.subject저온 결정화-
dc.subjectLow temperature crystallizaiton-
dc.subjectSolid phase crystallization-
dc.subjectMicrowave heating-
dc.title마이크로웨이브에 의한 비정질 실리콘의 저온 고상결정화 거동에 관한 연구-
dc.title.alternativeA study on the low-temperature solid phase crystallization behavior of amorphous silicon thin films by microwave heating-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN128167/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000935280-
dc.contributor.localauthor이정노-
dc.contributor.localauthorLee, Jeong-No-
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MS-Theses_Ph.D.(박사논문)
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