학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.8, [ iv, 159 p. ]
화학증착드; 휘발성 불규칙 접근 메모리; 케페시터; PLZT; Electron cyclotron resonance plasma; Chemical vapor deposition; Dynamic random access memory; Capacitor; 피엘지티; 자기공명 플라즈마
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