AlN 압전 박막의 우선 배향성 및 표면 탄성파 특성에 미치는 기판 효과에 관한 연구 = Substrate effects on the preferred orientation and surface acoustic wave characteristics of AlN piezoelectric films

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
113011/325007 / 000935183
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ xiv, 159 p. ]

Keywords

우선배향성; 압전성; 질화알루미늄 박막; 화학기상증착법; 표면탄성파; SAW; Preferred orientation; Piezoelectricity; AlN Film; ECR PECVD

URI
http://hdl.handle.net/10203/50174
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113011&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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