AlN 압전 박막의 우선 배향성 및 표면 탄성파 특성에 미치는 기판 효과에 관한 연구Substrate effects on the preferred orientation and surface acoustic wave characteristics of AlN piezoelectric films
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 113011/325007 / 000935183
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ xiv, 159 p. ]
- Keywords
우선배향성; 압전성; 질화알루미늄 박막; 화학기상증착법; 표면탄성파; SAW; Preferred orientation; Piezoelectricity; AlN Film; ECR PECVD
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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