AlN 압전 박막의 우선 배향성 및 표면 탄성파 특성에 미치는 기판 효과에 관한 연구Substrate effects on the preferred orientation and surface acoustic wave characteristics of AlN piezoelectric films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 서주원 | - |
| dc.contributor.author | Soh, Ju-Won | - |
| dc.date.accessioned | 2011-12-15T01:02:52Z | - |
| dc.date.available | 2011-12-15T01:02:52Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113011&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50174 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ xiv, 159 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 우선배향성 | - |
| dc.subject | 압전성 | - |
| dc.subject | 질화알루미늄 박막 | - |
| dc.subject | 화학기상증착법 | - |
| dc.subject | 표면탄성파 | - |
| dc.subject | SAW | - |
| dc.subject | Preferred orientation | - |
| dc.subject | Piezoelectricity | - |
| dc.subject | AlN Film | - |
| dc.subject | ECR PECVD | - |
| dc.title | AlN 압전 박막의 우선 배향성 및 표면 탄성파 특성에 미치는 기판 효과에 관한 연구 | - |
| dc.title.alternative | Substrate effects on the preferred orientation and surface acoustic wave characteristics of AlN piezoelectric films | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 113011/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000935183 | - |
| dc.contributor.localauthor | 서주원 | - |
| dc.contributor.localauthor | Soh, Ju-Won | - |
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