ECR PE-MOCVD법에 의해 증착된 $PbTiO_3$, PLT 박막의 특성에 관한 연구A study on the characteristics of $PbTiO_3$, PLT thin films deposited by ECR PE-MOCVD
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 108845/325007 / 000925334
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.8, [ iv, 190 p. ]
- Keywords
박막; 강유전체; 페로브스카이트; PLT; 금속유기화학증착법; 플라즈마화학증착법; 전자자기공명; DRAM; DRAM; Film; Ferroelectric; Perovskite; PLT; ECR; PECVD; MOCVD
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.