ECR PE-MOCVD법에 의해 증착된 $PbTiO_3$, PLT 박막의 특성에 관한 연구A study on the characteristics of $PbTiO_3$, PLT thin films deposited by ECR PE-MOCVD

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dc.contributor.advisor이원종-
dc.contributor.advisorLee, Won-Jong-
dc.contributor.author정성웅-
dc.contributor.authorChung, Sung-Woong-
dc.date.accessioned2011-12-15T01:02:34Z-
dc.date.available2011-12-15T01:02:34Z-
dc.date.issued1996-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=108845&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50156-
dc.description학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.8, [ iv, 190 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject박막-
dc.subject강유전체-
dc.subject페로브스카이트-
dc.subjectPLT-
dc.subject금속유기화학증착법-
dc.subject플라즈마화학증착법-
dc.subject전자자기공명-
dc.subjectDRAM-
dc.subjectDRAM-
dc.subjectFilm-
dc.subjectFerroelectric-
dc.subjectPerovskite-
dc.subjectPLT-
dc.subjectECR-
dc.subjectPECVD-
dc.subjectMOCVD-
dc.titleECR PE-MOCVD법에 의해 증착된 $PbTiO_3$, PLT 박막의 특성에 관한 연구-
dc.title.alternativeA study on the characteristics of $PbTiO_3$, PLT thin films deposited by ECR PE-MOCVD-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN108845/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000925334-
dc.contributor.localauthor정성웅-
dc.contributor.localauthorChung, Sung-Woong-
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MS-Theses_Ph.D.(박사논문)
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