ECR-PECVD 법으로 제조한 PZT 박막의 물성 연구Characteriszation of PZT thin films prepared by ECR-PECVD
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 108842/325007 / 000925076
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.8, [ [ii], 77 p. ]
- Keywords
금속유기화학증착법; PZT; 페로브스카이트; 강유전체; DRAM.; ECR; PECVD; MOCVD; PZT; Perovskite; Ferroelectric; DRAM; 전자자기공명; 플라즈마화학증착법
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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