ECR-PECVD 법으로 제조한 PZT 박막의 물성 연구 = Characteriszation of PZT thin films prepared by ECR-PECVD

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dc.contributor.advisor위당문-
dc.contributor.advisor이원종-
dc.contributor.advisorWee, Dang-Moon-
dc.contributor.advisorLee, Won-Jong-
dc.contributor.author김재환-
dc.contributor.authorKim, Jae-Whan-
dc.date.accessioned2011-12-15T01:02:31Z-
dc.date.available2011-12-15T01:02:31Z-
dc.date.issued1996-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=108842&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50153-
dc.description학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.8, [ [ii], 77 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject금속유기화학증착법-
dc.subjectPZT-
dc.subject페로브스카이트-
dc.subject강유전체-
dc.subjectDRAM.-
dc.subjectECR-
dc.subjectPECVD-
dc.subjectMOCVD-
dc.subjectPZT-
dc.subjectPerovskite-
dc.subjectFerroelectric-
dc.subjectDRAM-
dc.subject전자자기공명-
dc.subject플라즈마화학증착법-
dc.titleECR-PECVD 법으로 제조한 PZT 박막의 물성 연구 = Characteriszation of PZT thin films prepared by ECR-PECVD-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN108842/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000925076-
dc.contributor.localauthor김재환-
dc.contributor.localauthorKim, Jae-Whan-
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MS-Theses_Ph.D.(박사논문)
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