ECR-PECVD 법으로 제조한 PZT 박막의 물성 연구Characteriszation of PZT thin films prepared by ECR-PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 위당문 | - |
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Wee, Dang-Moon | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 김재환 | - |
| dc.contributor.author | Kim, Jae-Whan | - |
| dc.date.accessioned | 2011-12-15T01:02:31Z | - |
| dc.date.available | 2011-12-15T01:02:31Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=108842&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50153 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.8, [ [ii], 77 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 금속유기화학증착법 | - |
| dc.subject | PZT | - |
| dc.subject | 페로브스카이트 | - |
| dc.subject | 강유전체 | - |
| dc.subject | DRAM. | - |
| dc.subject | ECR | - |
| dc.subject | PECVD | - |
| dc.subject | MOCVD | - |
| dc.subject | PZT | - |
| dc.subject | Perovskite | - |
| dc.subject | Ferroelectric | - |
| dc.subject | DRAM | - |
| dc.subject | 전자자기공명 | - |
| dc.subject | 플라즈마화학증착법 | - |
| dc.title | ECR-PECVD 법으로 제조한 PZT 박막의 물성 연구 | - |
| dc.title.alternative | Characteriszation of PZT thin films prepared by ECR-PECVD | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 108842/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000925076 | - |
| dc.contributor.localauthor | 김재환 | - |
| dc.contributor.localauthor | Kim, Jae-Whan | - |
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