ECR-PECVD 법으로 제조한 PZT 박막의 물성 연구 = Characteriszation of PZT thin films prepared by ECR-PECVD

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Advisors
위당문researcher이원종researcherWee, Dang-MoonresearcherLee, Won-Jongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
108842/325007 / 000925076
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1996.8, [ [ii], 77 p. ]

Keywords

금속유기화학증착법; PZT; 페로브스카이트; 강유전체; DRAM.; ECR; PECVD; MOCVD; PZT; Perovskite; Ferroelectric; DRAM; 전자자기공명; 플라즈마화학증착법

URI
http://hdl.handle.net/10203/50153
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=108842&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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