비정질 실리콘 카바이드 화학증착 공정의 수치모사화 및 광학적, 전기적 특성연구 = A study on the process simulation and the properties of deposited a-SiC films in chemical vapor deposition

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Advisors
천성순researcherChun, Soung-Soonresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1990
Identifier
61587/325007 / 000855142
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.8, [ [iv], 183 p. ]

URI
http://hdl.handle.net/10203/50056
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61587&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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