비정질 실리콘 카바이드 화학증착 공정의 수치모사화 및 광학적, 전기적 특성연구A study on the process simulation and the properties of deposited a-SiC films in chemical vapor deposition
- Advisors
- 천성순researcher; Chun, Soung-Soonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1990
- Identifier
- 61587/325007 / 000855142
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.8, [ [iv], 183 p. ]
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.