비정질 실리콘 카바이드 화학증착 공정의 수치모사화 및 광학적, 전기적 특성연구A study on the process simulation and the properties of deposited a-SiC films in chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 박영진 | - |
| dc.contributor.author | Park, Young-Jin | - |
| dc.date.accessioned | 2011-12-15T01:00:57Z | - |
| dc.date.available | 2011-12-15T01:00:57Z | - |
| dc.date.issued | 1990 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61587&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50056 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.8, [ [iv], 183 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 비정질 실리콘 카바이드 화학증착 공정의 수치모사화 및 광학적, 전기적 특성연구 | - |
| dc.title.alternative | A study on the process simulation and the properties of deposited a-SiC films in chemical vapor deposition | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 61587/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000855142 | - |
| dc.contributor.localauthor | 박영진 | - |
| dc.contributor.localauthor | Park, Young-Jin | - |
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- MS-Theses_Ph.D.(박사논문)
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