$BF_2^+$ 이온주입된 실리콘의 격자손상이 불순물 농도분포에 미치는 영향 = Effects of lattice damage on impurity depth profiles in $BF_2^+$ ion implanted silicon

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Advisors
임호빈researcherIm, Ho-Binresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1990
Identifier
61586/325007 / 000805120
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.8, [ v, 104 p. ]

Keywords

격자 손상

URI
http://hdl.handle.net/10203/50055
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61586&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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