$BF_2^+$ 이온주입된 실리콘의 격자손상이 불순물 농도분포에 미치는 영향Effects of lattice damage on impurity depth profiles in $BF_2^+$ ion implanted silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 임호빈 | - |
| dc.contributor.advisor | Im, Ho-Bin | - |
| dc.contributor.author | 백문철 | - |
| dc.contributor.author | Paek, Mun-Cheol | - |
| dc.date.accessioned | 2011-12-15T01:00:56Z | - |
| dc.date.available | 2011-12-15T01:00:56Z | - |
| dc.date.issued | 1990 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61586&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50055 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.8, [ v, 104 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 격자 손상 | - |
| dc.title | $BF_2^+$ 이온주입된 실리콘의 격자손상이 불순물 농도분포에 미치는 영향 | - |
| dc.title.alternative | Effects of lattice damage on impurity depth profiles in $BF_2^+$ ion implanted silicon | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 61586/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000805120 | - |
| dc.contributor.localauthor | 백문철 | - |
| dc.contributor.localauthor | Paek, Mun-Cheol | - |
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