화학증착법에 의한 $Pb(Zr_x, Ti_{1-x})O_3$ 박막의 증착 거동 및 박막의 특성평가에 관한 연구A study on the deposition behavior and characterization of PZT thin film by MOCVD
- Advisors
- 김호기researcher; Kim, Ho-Giresearcher
- Description
- 한국과학기술원 : 무기재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1994
- Identifier
- 69683/325007 / 000885512
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 무기재료공학과, 1994.8, [ iv, 120 p. ]
- Keywords
Metalorganic chemical vapor deposition.; PZT (Lead zirconium titanate)
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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