화학증착법에 의한 $Pb(Zr_x, Ti_{1-x})O_3$ 박막의 증착 거동 및 박막의 특성평가에 관한 연구A study on the deposition behavior and characterization of PZT thin film by MOCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김호기 | - |
| dc.contributor.advisor | Kim, Ho-Gi | - |
| dc.contributor.author | 최준후 | - |
| dc.contributor.author | Choi, Joon-Hoo | - |
| dc.date.accessioned | 2011-12-15 | - |
| dc.date.available | 2011-12-15 | - |
| dc.date.issued | 1994 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69683&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/49928 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 무기재료공학과, 1994.8, [ iv, 120 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Metalorganic chemical vapor deposition. | - |
| dc.subject | PZT (Lead zirconium titanate) | - |
| dc.title | 화학증착법에 의한 $Pb(Zr_x, Ti_{1-x})O_3$ 박막의 증착 거동 및 박막의 특성평가에 관한 연구 | - |
| dc.title.alternative | A study on the deposition behavior and characterization of PZT thin film by MOCVD | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 69683/325007 | - |
| dc.description.department | 한국과학기술원 : 무기재료공학과, | - |
| dc.identifier.uid | 000885512 | - |
| dc.contributor.localauthor | 최준후 | - |
| dc.contributor.localauthor | Choi, Joon-Hoo | - |
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