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Ion beam synthesis of planar opto-electronic devices

Polman, A; Snoeks, E; vandenHoven, GN; Brongersma, ML; Serna, R; Shin, JungHoon; Kik, P; et al, NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, v.106, no.1-4, pp.393 - 399, 1995-12

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