Ion beam synthesis of planar opto-electronic devices

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Photonic technology requires the modification and synthesis of new materials and devices for the generation, guiding, switching, multiplexing and amplification of light. This paper reviews how some of these devices may be made using ion beam synthesis. Special attention is paid to the fabrication of erbium-doped optical waveguides.
Publisher
ELSEVIER SCIENCE BV
Issue Date
1995-12
Language
English
Article Type
Article; Proceedings Paper
Keywords

AL2O3 FILMS; SILICA; LUMINESCENCE; GLASS

Citation

NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, v.106, no.1-4, pp.393 - 399

ISSN
0168-583X
DOI
10.1016/0168-583X(95)00738-5
URI
http://hdl.handle.net/10203/74019
Appears in Collection
NT-Journal Papers(저널논문)
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