(The) photolithography simulation using the finite element method = 유한요소법을 이용한 Photolithography simulation

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 301
  • Download : 0
The most fundamental building block of the implementation of the finite element method is presented to be a guideline to the posterior coders of the finite element method. Using the finite element method, the solution of the 2-dimensional Maxwell``s equations which results from the problem of an infinitely long antenna oscillating along z-axis is obtained and compared to its exact solution. To solve those equations a various of the perfectly matched layer schemes are applied and compared with each other, and of which some discussions are presented. Using the finite element method and the perfectly matched layer scheme, the solutions of the simple 2-dimensional problems of the light phenomena are obtained and, using their results the simulations of the photolithography are presented.
Advisors
Kim, Soo-Yongresearcher김수용researcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
128595/325007 / 000911646
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 1997.2, [ ii, 97 p. ]

URI
http://hdl.handle.net/10203/48445
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128595&flag=dissertation
Appears in Collection
PH-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0