(The) photolithography simulation using the finite element method

Abstract

The most fundamental building block of the implementation of the finite element method is presented to be a guideline to the posterior coders of the finite element method. Using the finite element method, the solution of the 2-dimensional Maxwell``s equations which results from the problem of an infinitely long antenna oscillating along z-axis is obtained and compared to its exact solution. To solve those equations a various of the perfectly matched layer schemes are applied and compared with each other, and of which some discussions are presented. Using the finite element method and the perfectly matched layer scheme, the solutions of the simple 2-dimensional problems of the light phenomena are obtained and, using their results the simulations of the photolithography are presented.