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Composition dependence of room temperature 1.5 mu m Er3+ luminescence from erbium doped silicon : oxygen thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition Shin, JungHoon; Kim, M.-J.; Seo, S.-Y.; Lee, Ch., Proceedings of the 1997 MRS Symposium, pp.275 - 280, MRS, 1997-12-01 |
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